Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates: Fid-Bau Portal

Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates

Jin, S. / Bender, H. / Li, X. N. / Zhang, Z. / Dong, C. / Gong, Z. X. / Ma, T. C.

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Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates

Jin, S. / Bender, H. / Li, X. N. / Zhang, Z. / Dong, C. / Gong, Z. X. / Ma, T. C.

Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates

Jin, S. / Bender, H. / Li, X. N. / Zhang, Z. / Dong, C. / Gong, Z. X. / Ma, T. C.

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Document information

Title:

Microstructural studies of Fe-silicide films produced by metal vapor vacuum arc ion implantation of Fe into Si substrates

Contributors:

Jin, S. (author) / Bender, H. (author) / Li, X. N. (author) / Zhang, Z. (author) / Dong, C. (author) / Gong, Z. X. (author) / Ma, T. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 115 ; 116-123

Publication date:

1997-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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