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Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams
Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams
Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams
Tanaka, M. (author) / Chu, F. (author) / Shimojo, M. (author) / Takeguchi, M. (author) / Mitsuishi, K. (author) / Furuya, K. (author)
JOURNAL OF MATERIALS SCIENCE ; 41 ; 2667-2671
2006-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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