Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

    New search for: Choi, S. S.
    New search for: Kim, D. W.
    New search for: Joe, J. W.
    New search for: Moon, J. H.
    New search for: Park, K. C.
    New search for: Jang, J.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

    New search for: Choi, S. S.
    New search for: Kim, D. W.
    New search for: Joe, J. W.
    New search for: Moon, J. H.
    New search for: Park, K. C.
    New search for: Jang, J.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

    New search for: Choi, S. S.
    New search for: Kim, D. W.
    New search for: Joe, J. W.
    New search for: Moon, J. H.
    New search for: Park, K. C.
    New search for: Jang, J.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

    Contributors:

    Choi, S. S. (author) / Kim, D. W. (author) / Joe, J. W. (author) / Moon, J. H. (author) / Park, K. C. (author) / Jang, J. (author) / Camassel, J. / Fricke, K. / Krozer, V. / Robert, J. L.

    Published in:

    High Temperature Electronics: Materials, Devices and Applications ; 133-136

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 46

    Publication date:

    1997-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    AIN thin films by plasma-enhanced chemical vapour deposition

    Lee, C. H. / Wu, C. T. / Pueng, C. Y. | British Library Online Contents | 1992

    Chemical Vapour Deposition of Diamond

    Marinkovic, S. N. | British Library Online Contents | 1996

    Microstructures of diamond films deposited on (100) silicon wafer by microwave plasma-enhanced chemical vapour deposition

    Jung Ho Je / Lee, G. Y. | British Library Online Contents | 1992

    Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition

    Tzeng, S. S. / Wu, W. M. / Hsu, J. S. | British Library Online Contents | 2007

    Chemical Vapour Deposition Diamond Coated Drawing Dies

    Sun, F. H. / Wang, X. G. / Zhang, Z. M. et al. | British Library Online Contents | 2004

    Back to top