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    Montecarlo simulation of ion implantation into SiC-6H single crystal including channeling effect

    New search for: Morvan, E.
    New search for: Godignon, P.
    New search for: Montserrat, J.
    New search for: Fernandez, J.
    New search for: Flores, D.
    New search for: Millan, J.
    New search for: Chante, J. P.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

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    Montecarlo simulation of ion implantation into SiC-6H single crystal including channeling effect

    New search for: Morvan, E.
    New search for: Godignon, P.
    New search for: Montserrat, J.
    New search for: Fernandez, J.
    New search for: Flores, D.
    New search for: Millan, J.
    New search for: Chante, J. P.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Montecarlo simulation of ion implantation into SiC-6H single crystal including channeling effect

    New search for: Morvan, E.
    New search for: Godignon, P.
    New search for: Montserrat, J.
    New search for: Fernandez, J.
    New search for: Flores, D.
    New search for: Millan, J.
    New search for: Chante, J. P.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Title:

    Montecarlo simulation of ion implantation into SiC-6H single crystal including channeling effect

    Contributors:

    Morvan, E. (author) / Godignon, P. (author) / Montserrat, J. (author) / Fernandez, J. (author) / Flores, D. (author) / Millan, J. (author) / Chante, J. P. (author) / Camassel, J. / Fricke, K. / Krozer, V.

    Published in:

    High Temperature Electronics: Materials, Devices and Applications ; 218-222

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 46

    Publication date:

    1997-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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