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    Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide

    New search for: Zolnai, Z.
    New search for: Khanh, N. Q.
    New search for: Lohner, T.
    New search for: Ster, A.
    New search for: Kotai, E.
    New search for: Vickridge, I.
    New search for: Gyulai, J.
    New search for: Bergman, P.
    New search for: Janzen, E.

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    Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide

    New search for: Zolnai, Z.
    New search for: Khanh, N. Q.
    New search for: Lohner, T.
    New search for: Ster, A.
    New search for: Kotai, E.
    New search for: Vickridge, I.
    New search for: Gyulai, J.
    New search for: Bergman, P.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide

    New search for: Zolnai, Z.
    New search for: Khanh, N. Q.
    New search for: Lohner, T.
    New search for: Ster, A.
    New search for: Kotai, E.
    New search for: Vickridge, I.
    New search for: Gyulai, J.
    New search for: Bergman, P.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Damage Distributions Induced by Channeling Implantation of Nitrogen into 6H Silicon Carbide

    Contributors:

    Zolnai, Z. (author) / Khanh, N. Q. (author) / Lohner, T. (author) / Ster, A. (author) / Kotai, E. (author) / Vickridge, I. (author) / Gyulai, J. (author) / Bergman, P. / Janzen, E.

    Published in:

    Silicon Carbide and Related Materials 2002 ; 645-648

    MATERIALS SCIENCE FORUM ; 433/436

    Publication date:

    2003-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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