PECVD in-situ growth of silicon quantum dots in silicon nitride from silane and nitrogen: Fid-Bau Portal

PECVD in-situ growth of silicon quantum dots in silicon nitride from silane and nitrogen

Mercaldo, L. V. / Veneri, P. D. / Esposito, E. / Massera, E. / Usatii, I. / Privato, C.

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PECVD in-situ growth of silicon quantum dots in silicon nitride from silane and nitrogen

Mercaldo, L. V. / Veneri, P. D. / Esposito, E. / Massera, E. / Usatii, I. / Privato, C.

PECVD in-situ growth of silicon quantum dots in silicon nitride from silane and nitrogen

Mercaldo, L. V. / Veneri, P. D. / Esposito, E. / Massera, E. / Usatii, I. / Privato, C.

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Title:

PECVD in-situ growth of silicon quantum dots in silicon nitride from silane and nitrogen

Contributors:

Mercaldo, L. V. (author) / Veneri, P. D. (author) / Esposito, E. (author) / Massera, E. (author) / Usatii, I. (author) / Privato, C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 159-160 ; 77-79

Publication date:

2009-01-01

Size:

3 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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