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In situ monitoring of gas source molecular beam epitaxy of silicon with disilane by ultraviolet photoelectron spectroscopy
In situ monitoring of gas source molecular beam epitaxy of silicon with disilane by ultraviolet photoelectron spectroscopy
In situ monitoring of gas source molecular beam epitaxy of silicon with disilane by ultraviolet photoelectron spectroscopy
Sakamoto, H. (author) / Takakuwa, Y. (author) / Enta, Y. (author) / Horie, T. (author) / Hori, T. (author) / Yamaguchi, T. (author) / Miyamoto, N. (author) / Kato, H. (author)
APPLIED SURFACE SCIENCE ; 117/118 ; 77-81
1997-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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