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Effects of oxygen on selective silicon deposition using disilane
Effects of oxygen on selective silicon deposition using disilane
Effects of oxygen on selective silicon deposition using disilane
O'Neil, P. A. (author) / Oeztuerk, M. C. (author) / Batchelor, A. D. (author) / Maher, D. M. (author)
MATERIALS LETTERS ; 38 ; 418-422
1999-01-01
5 pages
Article (Journal)
English
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