A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Damage and contamination free fabrication of thin Si wires with highly controlled feature size
Damage and contamination free fabrication of thin Si wires with highly controlled feature size
Damage and contamination free fabrication of thin Si wires with highly controlled feature size
Shinada, T. (author) / Kimura, H. (author) / Kumura, Y. (author) / Ohdomari, I. (author)
APPLIED SURFACE SCIENCE ; 117/118 ; 684-689
1997-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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