Electrical and structural properties of SrTiO~3 thin films deposited by plasma-enhanced metalorganic chemical vapor deposition: Fid-Bau Portal

Electrical and structural properties of SrTiO~3 thin films deposited by plasma-enhanced metalorganic chemical vapor deposition

Kim, N.-K. / Yoon, S.-G. / Lee, W.-J. / Kim, H.-G.

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Electrical and structural properties of SrTiO~3 thin films deposited by plasma-enhanced metalorganic chemical vapor deposition

Kim, N.-K. / Yoon, S.-G. / Lee, W.-J. / Kim, H.-G.

Electrical and structural properties of SrTiO~3 thin films deposited by plasma-enhanced metalorganic chemical vapor deposition

Kim, N.-K. / Yoon, S.-G. / Lee, W.-J. / Kim, H.-G.

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Check availability in my library

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Document information

Title:

Electrical and structural properties of SrTiO~3 thin films deposited by plasma-enhanced metalorganic chemical vapor deposition

Contributors:

Kim, N.-K. (author) / Yoon, S.-G. (author) / Lee, W.-J. (author) / Kim, H.-G. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 1160-1164

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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