Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence: Fid-Bau Portal

Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence

Rodriguez-Navarro, A. / Ota�o-Rivera, W. / Garcia-Ruiz, J. M. / Messier, R. / Pilione, L. J.

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Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence

Rodriguez-Navarro, A. / Ota�o-Rivera, W. / Garcia-Ruiz, J. M. / Messier, R. / Pilione, L. J.

Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence

Rodriguez-Navarro, A. / Ota�o-Rivera, W. / Garcia-Ruiz, J. M. / Messier, R. / Pilione, L. J.

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Check availability in my library

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Document information

Title:

Preparation of highly oriented polycrystalline AlN thin films deposited on glass at oblique-angle incidence

Contributors:

Rodriguez-Navarro, A. (author) / Ota�o-Rivera, W. (author) / Garcia-Ruiz, J. M. (author) / Messier, R. (author) / Pilione, L. J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 1689-1692

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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