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    Influence of Ar impurities on optical refractive index of sputter deposited a-Si films

    New search for: Takahashi, H.
    New search for: Kataoka, H.
    New search for: Nagata, H.

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    Influence of Ar impurities on optical refractive index of sputter deposited a-Si films

    New search for: Takahashi, H.
    New search for: Kataoka, H.
    New search for: Nagata, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of Ar impurities on optical refractive index of sputter deposited a-Si films

    New search for: Takahashi, H.
    New search for: Kataoka, H.
    New search for: Nagata, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Title:

    Influence of Ar impurities on optical refractive index of sputter deposited a-Si films

    Contributors:

    Takahashi, H. (author) / Kataoka, H. (author) / Nagata, H. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 1722-1726

    Publication date:

    1997-01-01

    Size:

    5 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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