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Influence of Ar impurities on optical refractive index of sputter deposited a-Si films
Influence of Ar impurities on optical refractive index of sputter deposited a-Si films
Influence of Ar impurities on optical refractive index of sputter deposited a-Si films
Takahashi, H. (Autor:in) / Kataoka, H. (Autor:in) / Nagata, H. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 1722-1726
01.01.1997
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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