Void nucleation in passivated interconnect lines: Effects of site geometries, interfaces, and interface flaws: Fid-Bau Portal

Void nucleation in passivated interconnect lines: Effects of site geometries, interfaces, and interface flaws

Gleixner, R. J. / Clemens, B. M. / Nix, W. D.

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Void nucleation in passivated interconnect lines: Effects of site geometries, interfaces, and interface flaws

Gleixner, R. J. / Clemens, B. M. / Nix, W. D.

Void nucleation in passivated interconnect lines: Effects of site geometries, interfaces, and interface flaws

Gleixner, R. J. / Clemens, B. M. / Nix, W. D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Void nucleation in passivated interconnect lines: Effects of site geometries, interfaces, and interface flaws

Contributors:

Gleixner, R. J. (author) / Clemens, B. M. (author) / Nix, W. D. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 2081-2090

Publication date:

1997-01-01

Size:

10 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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