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Practical processing issues in titanium silicide CVD

Southwell, R. P. / Seebauer, E. G.

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Practical processing issues in titanium silicide CVD

Southwell, R. P. / Seebauer, E. G.

Practical processing issues in titanium silicide CVD

Southwell, R. P. / Seebauer, E. G.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Practical processing issues in titanium silicide CVD

Contributors:

Southwell, R. P. (author) / Seebauer, E. G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 119 ; 41-49

Publication date:

1997-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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