A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
A parametric study of titanium silicide formation by rapid thermal processing
A parametric study of titanium silicide formation by rapid thermal processing
A parametric study of titanium silicide formation by rapid thermal processing
Amorsolo, A. V. (author) / Funkenbusch, P. D. (author) / Kadin, A. M. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 412-421
1996-01-01
10 pages
Article (Journal)
English
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
In-process control of silicide formation during rapid thermal processing
| British Library Online Contents | 1993
Practical processing issues in titanium silicide CVD
| British Library Online Contents | 1997
Formation mechanism of titanium silicide by mechanical alloying
| British Library Online Contents | 2001
Reliability study of sub-micron titanium silicide contacts
| British Library Online Contents | 1996