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Materials Issues and Characterization of Low-k Dielectric Materials

Ryan, E. T. / McKerrow, A. J. / Leu, J. / Ho, P. S.

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Materials Issues and Characterization of Low-k Dielectric Materials

Ryan, E. T. / McKerrow, A. J. / Leu, J. / Ho, P. S.

Materials Issues and Characterization of Low-k Dielectric Materials

Ryan, E. T. / McKerrow, A. J. / Leu, J. / Ho, P. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Materials Issues and Characterization of Low-k Dielectric Materials

Contributors:

Ryan, E. T. (author) / McKerrow, A. J. (author) / Leu, J. (author) / Ho, P. S. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 22 ; 49-54

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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