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Low-k dielectric materials

Shamiryan, D. / Abell, T. / Iacopi, F. / Maex, K.

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Low-k dielectric materials

Shamiryan, D. / Abell, T. / Iacopi, F. / Maex, K.

Low-k dielectric materials

Shamiryan, D. / Abell, T. / Iacopi, F. / Maex, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Low-k dielectric materials

Contributors:

Shamiryan, D. (author) / Abell, T. (author) / Iacopi, F. (author) / Maex, K. (author)

Published in:

MATERIALS TODAY -OXFORD THEN KIDLINGTON- ; 7 ; 34-39

Publication date:

2004-01-01

Size:

6 pages

ISSN:

1369-7021

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11299

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