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    Fluorinated Amorphous Carbon as a Low-Dielectric-Constant Interlayer Dielectric

    New search for: Endo, K.

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    Fluorinated Amorphous Carbon as a Low-Dielectric-Constant Interlayer Dielectric

    New search for: Endo, K.

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    Access via TIB
    Check availability in my library
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    Fluorinated Amorphous Carbon as a Low-Dielectric-Constant Interlayer Dielectric

    New search for: Endo, K.

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    Document information
    Title:

    Fluorinated Amorphous Carbon as a Low-Dielectric-Constant Interlayer Dielectric

    Contributors:

    Endo, K. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 22 ; 55-60

    Publication date:

    1997-01-01

    Size:

    6 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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