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Characterization of low dielectric constant amorphous carbon nitride films

Aono, M. / Nitta, S. / Katsuno, T. / Itoh, T. / Nonomura, S.

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Characterization of low dielectric constant amorphous carbon nitride films

Aono, M. / Nitta, S. / Katsuno, T. / Itoh, T. / Nonomura, S.

Characterization of low dielectric constant amorphous carbon nitride films

Aono, M. / Nitta, S. / Katsuno, T. / Itoh, T. / Nonomura, S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characterization of low dielectric constant amorphous carbon nitride films

Contributors:

Aono, M. (author) / Nitta, S. (author) / Katsuno, T. (author) / Itoh, T. (author) / Nonomura, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 159-160 ; 341-344

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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