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Highly preferred crystalline carbon thin films obtained by DC magnetron sputtering with a hot filament

Kawai, Y. / Oo, M. T. / Nakao, M. / Kamimura, K. / Matsushima, H. / Onuma, Y.

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Highly preferred crystalline carbon thin films obtained by DC magnetron sputtering with a hot filament

Kawai, Y. / Oo, M. T. / Nakao, M. / Kamimura, K. / Matsushima, H. / Onuma, Y.

Highly preferred crystalline carbon thin films obtained by DC magnetron sputtering with a hot filament

Kawai, Y. / Oo, M. T. / Nakao, M. / Kamimura, K. / Matsushima, H. / Onuma, Y.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Highly preferred crystalline carbon thin films obtained by DC magnetron sputtering with a hot filament

Contributors:

Kawai, Y. (author) / Oo, M. T. (author) / Nakao, M. (author) / Kamimura, K. (author) / Matsushima, H. (author) / Onuma, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 121/122 ; 156-159

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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