Techniques for Chemically Assisted Etching and Polishing of Semiconductor Wafers: Fid-Bau Portal

Techniques for Chemically Assisted Etching and Polishing of Semiconductor Wafers

Perevoshchikov, V. A. / Skupov, V. D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Techniques for Chemically Assisted Etching and Polishing of Semiconductor Wafers

Perevoshchikov, V. A. / Skupov, V. D.

Techniques for Chemically Assisted Etching and Polishing of Semiconductor Wafers

Perevoshchikov, V. A. / Skupov, V. D.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Techniques for Chemically Assisted Etching and Polishing of Semiconductor Wafers

Contributors:

Perevoshchikov, V. A. (author) / Skupov, V. D. (author)

Published in:

INDUSTRIAL LABORATORY C/C OF ZAVODSKAIA LABORATORIIA ; 63 ; 226-231

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0019-8447

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 607.2

Perevoshchikov, V. A. / Skupov, V. D. / Shengurov, V. G. | British Library Online Contents | 1996

Formation of In nanoparticles on InP wafers by laser-assisted etching

Musaev, O. R. / Dusevich, V. / Wrobel, J. M. et al. | British Library Online Contents | 2011

Polishing of CVD Diamond Wafers and Films

Feng, H.B. / Chen, Y.Q. / Zhang, L.C. | British Library Online Contents | 2013

Comparison between Polishing Etching of On and Off-Axis C and Si-Faces of 4H-SiC Wafers

Kosciewicz, K. / Strupinski, W. / Olszyna, A. | British Library Online Contents | 2009

Microfabrication for Si wafers by FAB etching

Nishimura, T. / Suzuki, H. / Satake, T. | British Library Online Contents | 1993