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    Effect of slurry viscosity modification on oxide and tungsten CMP

    New search for: Grover, G. S.
    New search for: Liang, H.
    New search for: Ganeshkumar, S.
    New search for: Fortino, W.

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    Effect of slurry viscosity modification on oxide and tungsten CMP

    New search for: Grover, G. S.
    New search for: Liang, H.
    New search for: Ganeshkumar, S.
    New search for: Fortino, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of slurry viscosity modification on oxide and tungsten CMP

    New search for: Grover, G. S.
    New search for: Liang, H.
    New search for: Ganeshkumar, S.
    New search for: Fortino, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of slurry viscosity modification on oxide and tungsten CMP

    Contributors:

    Grover, G. S. (author) / Liang, H. (author) / Ganeshkumar, S. (author) / Fortino, W. (author)

    Published in:

    WEAR -LAUSANNE- ; 214 ; 10-13

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0043-1648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11292

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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