Formation of Tungsten Ohmic Contact on n-Type 6H-SiC by Pulsed Laser Processes: Fid-Bau Portal

Formation of Tungsten Ohmic Contact on n-Type 6H-SiC by Pulsed Laser Processes

Nakashima, K. / Eryu, O. / Kume, T. / Nakata, T. / Inoue, M.

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Formation of Tungsten Ohmic Contact on n-Type 6H-SiC by Pulsed Laser Processes

Nakashima, K. / Eryu, O. / Kume, T. / Nakata, T. / Inoue, M.

Formation of Tungsten Ohmic Contact on n-Type 6H-SiC by Pulsed Laser Processes

Nakashima, K. / Eryu, O. / Kume, T. / Nakata, T. / Inoue, M.

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Document information

Title:

Formation of Tungsten Ohmic Contact on n-Type 6H-SiC by Pulsed Laser Processes

Contributors:

Nakashima, K. (author) / Eryu, O. (author) / Kume, T. (author) / Nakata, T. (author) / Inoue, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 264/268 ; 779-782

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Watte, J. / Silverans, R. E. / Van Hove, M. et al. | British Library Online Contents | 1993

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