Surface Micromachining of Polycrystalline SiC Deposited on SiO~2 by APCVD: Fid-Bau Portal

Surface Micromachining of Polycrystalline SiC Deposited on SiO~2 by APCVD

Fleischman, A. J. / Wei, X. / Zorman, C. A. / Mehregany, M.

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Surface Micromachining of Polycrystalline SiC Deposited on SiO~2 by APCVD

Fleischman, A. J. / Wei, X. / Zorman, C. A. / Mehregany, M.

Surface Micromachining of Polycrystalline SiC Deposited on SiO~2 by APCVD

Fleischman, A. J. / Wei, X. / Zorman, C. A. / Mehregany, M.

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Check availability in my library

Order at Subito €

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Document information

Title:

Surface Micromachining of Polycrystalline SiC Deposited on SiO~2 by APCVD

Contributors:

Fleischman, A. J. (author) / Wei, X. (author) / Zorman, C. A. (author) / Mehregany, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 264/268 ; 885-888

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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