Characterization of Polycrystalline SiC Grown on SiO~2 and Si~3N~4 by APCVD for MEMS Applications: Fid-Bau Portal

Characterization of Polycrystalline SiC Grown on SiO~2 and Si~3N~4 by APCVD for MEMS Applications

Wu, C.-H. / Zorman, C. A. / Mehregany, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Characterization of Polycrystalline SiC Grown on SiO~2 and Si~3N~4 by APCVD for MEMS Applications

Wu, C.-H. / Zorman, C. A. / Mehregany, M.

Characterization of Polycrystalline SiC Grown on SiO~2 and Si~3N~4 by APCVD for MEMS Applications

Wu, C.-H. / Zorman, C. A. / Mehregany, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Characterization of Polycrystalline SiC Grown on SiO~2 and Si~3N~4 by APCVD for MEMS Applications

Contributors:

Wu, C.-H. (author) / Zorman, C. A. (author) / Mehregany, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 541-544

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Fleischman, A. J. / Wei, X. / Zorman, C. A. et al. | British Library Online Contents | 1998

Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD

Chen, L. / Fu, X. A. / Zorman, C. A. et al. | British Library Online Contents | 2006

Structural, optical and electrochemical properties of TiO2 thin films grown by APCVD method

Quinonez, C. / Vallejo, W. / Gordillo, G. | British Library Online Contents | 2010

Investigation of structure and properties of N-doped TiO2 thin films grown by APCVD

Guo, Y. / Zhang, X. w. / Han, G. r. | British Library Online Contents | 2006

Cryogenic field effect transistors using strained silicon quantum wells in Si:SiGe heterostructures grown by APCVD

Rack, M. J. / Thornton, T. J. / Ferry, D. K. et al. | British Library Online Contents | 2001