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Dependence of Channel Mobility on the Surface Step Orientation in Planar 6H-SiC MOSFETs
Dependence of Channel Mobility on the Surface Step Orientation in Planar 6H-SiC MOSFETs
Dependence of Channel Mobility on the Surface Step Orientation in Planar 6H-SiC MOSFETs
Scharnholz, S. (author) / Von Kamienski, E. S. (author) / Goelz, A. (author) / Leonhard, C. (author) / Kurz, H. (author)
MATERIALS SCIENCE FORUM ; 264/268 ; 1001-1004
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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