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Electrical characterization of electron beam induced defects in epitaxially grown Si~1~-~xGe~x
Electrical characterization of electron beam induced defects in epitaxially grown Si~1~-~xGe~x
Electrical characterization of electron beam induced defects in epitaxially grown Si~1~-~xGe~x
Mamor, M. (author) / Auret, F. D. (author) / Goodman, S. A. (author) / Myburg, G. (author) / Deenapanray, P. N. K. (author) / Meyer, W. E. (author)
MATERIALS SCIENCE FORUM ; 258/263 ; 115-120
1997-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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