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Excimer laser synthesis of thin AlN coatings
Excimer laser synthesis of thin AlN coatings
Excimer laser synthesis of thin AlN coatings
Boulmer-Leborgne, C. (author) / Thomann, A. L. (author) / Andreazza, P. (author) / Andreazza-Vignolle, C. (author) / Hermann, J. (author) / Craciun, V. (author) / Echegut, P. (author) / Craciun, D. (author)
APPLIED SURFACE SCIENCE ; 125 ; 137-148
1998-01-01
12 pages
Article (Journal)
English
DDC:
621.35
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