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    Bulk micromachining characterization of 0.2 m HEMT MMIC technology for GaAs MEMS design

    New search for: Ribas, R. P.
    New search for: Leclercq, J. L.
    New search for: Karam, J. M.
    New search for: Courtois, B.
    New search for: Viktorovitch, P.

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    Bulk micromachining characterization of 0.2 m HEMT MMIC technology for GaAs MEMS design

    New search for: Ribas, R. P.
    New search for: Leclercq, J. L.
    New search for: Karam, J. M.
    New search for: Courtois, B.
    New search for: Viktorovitch, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Bulk micromachining characterization of 0.2 m HEMT MMIC technology for GaAs MEMS design

    New search for: Ribas, R. P.
    New search for: Leclercq, J. L.
    New search for: Karam, J. M.
    New search for: Courtois, B.
    New search for: Viktorovitch, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Bulk micromachining characterization of 0.2 m HEMT MMIC technology for GaAs MEMS design

    Contributors:

    Ribas, R. P. (author) / Leclercq, J. L. (author) / Karam, J. M. (author) / Courtois, B. (author) / Viktorovitch, P. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 51 ; 267-273

    Publication date:

    1998-01-01

    Size:

    7 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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