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Lateral RF MEMS Switch Based on Surface Micromachining Process

Du, G.P. / Zhu, J. / Yu, Y.W. / Jia, S.X. / Jiang, L.L.

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Lateral RF MEMS Switch Based on Surface Micromachining Process

Du, G.P. / Zhu, J. / Yu, Y.W. / Jia, S.X. / Jiang, L.L.

Lateral RF MEMS Switch Based on Surface Micromachining Process

Du, G.P. / Zhu, J. / Yu, Y.W. / Jia, S.X. / Jiang, L.L.

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Check availability in my library

Order at Subito €

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Document information

Title:

Lateral RF MEMS Switch Based on Surface Micromachining Process

Contributors:

Du, G.P. (author) / Zhu, J. (author) / Yu, Y.W. (author) / Jia, S.X. (author) / Jiang, L.L. (author)

Published in:

KEY ENGINEERING MATERIALS ; 483 ; 457-460

Publication date:

2011-01-01

Size:

4 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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