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Demonstration of Deep (80 mum) RIE Etching of SiC for MEMS and MMIC Applications

Sheridan, D. C. / Casady, J. B. / Ellis, E. C. / Siergiej, R. R. / Cressler, J. D. / Strong, R. M. / Urban, W. M. / Valek, W. F. / Seiler, C. F. / Buhay, H.

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Demonstration of Deep (80 mum) RIE Etching of SiC for MEMS and MMIC Applications

Sheridan, D. C. / Casady, J. B. / Ellis, E. C. / Siergiej, R. R. / Cressler, J. D. / Strong, R. M. / Urban, W. M. / Valek, W. F. / Seiler, C. F. / Buhay, H.

Demonstration of Deep (80 mum) RIE Etching of SiC for MEMS and MMIC Applications

Sheridan, D. C. / Casady, J. B. / Ellis, E. C. / Siergiej, R. R. / Cressler, J. D. / Strong, R. M. / Urban, W. M. / Valek, W. F. / Seiler, C. F. / Buhay, H.

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Title:

Demonstration of Deep (80 mum) RIE Etching of SiC for MEMS and MMIC Applications

Contributors:

Sheridan, D. C. (author) / Casady, J. B. (author) / Ellis, E. C. (author) / Siergiej, R. R. (author) / Cressler, J. D. (author) / Strong, R. M. (author) / Urban, W. M. (author) / Valek, W. F. (author) / Seiler, C. F. (author) / Buhay, H. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 1053-1056

Publication date:

2000-01-01

Size:

4 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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