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Compositional Monitoring of Thin Inhomogeneous Oxide Films by the Ellipsometric Tomography Method
Compositional Monitoring of Thin Inhomogeneous Oxide Films by the Ellipsometric Tomography Method
Compositional Monitoring of Thin Inhomogeneous Oxide Films by the Ellipsometric Tomography Method
Kotenev, V. A. (author) / Perepelkin, M. V. (author)
INDUSTRIAL LABORATORY C/C OF ZAVODSKAIA LABORATORIIA ; 63 ; 404-407
1997-01-01
4 pages
Article (Journal)
English
DDC:
607.2
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