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Residual Stress in Si~3N~4 Passivated GaAs Wafers

Ward, A. / Hendricks, R. W.

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Residual Stress in Si~3N~4 Passivated GaAs Wafers

Ward, A. / Hendricks, R. W.

Residual Stress in Si~3N~4 Passivated GaAs Wafers

Ward, A. / Hendricks, R. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Residual Stress in Si~3N~4 Passivated GaAs Wafers

Contributors:

Ward, A. (author) / Hendricks, R. W. (author)

Published in:

ADVANCES IN X RAY ANALYSIS ; 237-242

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0376-0308

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 539.7222

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