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Surface chemical states on LPCVD-grown 4H-SiC epilayers

Wee, A. T. S. / Li, K. / Tin, C. C.

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Surface chemical states on LPCVD-grown 4H-SiC epilayers

Wee, A. T. S. / Li, K. / Tin, C. C.

Surface chemical states on LPCVD-grown 4H-SiC epilayers

Wee, A. T. S. / Li, K. / Tin, C. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Surface chemical states on LPCVD-grown 4H-SiC epilayers

Contributors:

Wee, A. T. S. (author) / Li, K. (author) / Tin, C. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 126 ; 34-42

Publication date:

1998-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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