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Surface Morphology of 3C-SiC Heteroepitaxial Layers Grown by LPCVD on Si Substrates
Surface Morphology of 3C-SiC Heteroepitaxial Layers Grown by LPCVD on Si Substrates
Surface Morphology of 3C-SiC Heteroepitaxial Layers Grown by LPCVD on Si Substrates
Takahashi, T. (author) / Ishida, Y. (author) / Okumura, H. (author) / Yoshida, S. (author) / Sekigawa, T. (author) / Pensl, G. / Morkoc, H. / Monemar, B. / Janzen, E.
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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