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XPS study of XeCl excimer-laser-etched InP

Wrobel, J. M. / Moffitt, C. E. / Wieliczka, D. M. / Dubowski, J. J. / Fraser, J. W.

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XPS study of XeCl excimer-laser-etched InP

Wrobel, J. M. / Moffitt, C. E. / Wieliczka, D. M. / Dubowski, J. J. / Fraser, J. W.

XPS study of XeCl excimer-laser-etched InP

Wrobel, J. M. / Moffitt, C. E. / Wieliczka, D. M. / Dubowski, J. J. / Fraser, J. W.

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Check availability in my library

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Document information

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Document information

Title:

XPS study of XeCl excimer-laser-etched InP

Contributors:

Wrobel, J. M. (author) / Moffitt, C. E. (author) / Wieliczka, D. M. (author) / Dubowski, J. J. (author) / Fraser, J. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 127-129 ; 805-809

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Geiger, M. / Becker, W. / Rebhan, T. et al. | British Library Online Contents | 1996

Properties of Recrystallized Amorphous Silicon Prepared by XeCl Excimer Laser Irradiation

Ulrych, I. / El-Kader, K. M. A. / Chab, V. et al. | British Library Online Contents | 1995

Microetching of fused silica by laser ablation of organic solution with XeCl excimer laser

Yasui, Y. / Niino, H. / Kawaguchi, Y. et al. | British Library Online Contents | 2002

Theoretical and experimental studies of a-Si:H recrystallization by XeCl excimer laser irradiation

Cerny, R. / Vydra, V. / Prikryl, P. et al. | British Library Online Contents | 1995

Carbon nitride films deposited by very high-fluence XeCl excimer-laser reactive ablation

Acquaviva, S. / D'Anna, E. / De Giorgi, M. L. et al. | British Library Online Contents | 2000