Local bonding structures of SiO~2 films on H-terminated Si(100) surfaces studied by using high-resolution electron energy loss spectroscopy: Fid-Bau Portal

Local bonding structures of SiO~2 films on H-terminated Si(100) surfaces studied by using high-resolution electron energy loss spectroscopy

Nakagawa, Y. / Higashi, M. / Ikeda, H. / Zaima, S. / Yasuda, Y.

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Local bonding structures of SiO~2 films on H-terminated Si(100) surfaces studied by using high-resolution electron energy loss spectroscopy

Nakagawa, Y. / Higashi, M. / Ikeda, H. / Zaima, S. / Yasuda, Y.

Local bonding structures of SiO~2 films on H-terminated Si(100) surfaces studied by using high-resolution electron energy loss spectroscopy

Nakagawa, Y. / Higashi, M. / Ikeda, H. / Zaima, S. / Yasuda, Y.

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Check availability in my library

Order at Subito €

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Document information

Title:

Local bonding structures of SiO~2 films on H-terminated Si(100) surfaces studied by using high-resolution electron energy loss spectroscopy

Contributors:

Nakagawa, Y. (author) / Higashi, M. (author) / Ikeda, H. (author) / Zaima, S. (author) / Yasuda, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 130-132 ; 192-196

Publication date:

1998-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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