Evolution of stresses in passivated and unpassivated metal interconnects: Fid-Bau Portal

Evolution of stresses in passivated and unpassivated metal interconnects

Gouldstone, A. / Shen, Y.-L. / Suresh, S. / Thompson, C. V.

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Evolution of stresses in passivated and unpassivated metal interconnects

Gouldstone, A. / Shen, Y.-L. / Suresh, S. / Thompson, C. V.

Evolution of stresses in passivated and unpassivated metal interconnects

Gouldstone, A. / Shen, Y.-L. / Suresh, S. / Thompson, C. V.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Evolution of stresses in passivated and unpassivated metal interconnects

Contributors:

Gouldstone, A. (author) / Shen, Y.-L. (author) / Suresh, S. (author) / Thompson, C. V. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 1956-1966

Publication date:

1998-01-01

Size:

11 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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