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A platform for research: civil engineering, architecture and urbanism
Wet rapid thermal oxidation of silicon with a pyrogenic system
Wet rapid thermal oxidation of silicon with a pyrogenic system
Wet rapid thermal oxidation of silicon with a pyrogenic system
Lerch, W. (author) / Roters, G. (author) / Munzinger, P. (author) / Mader, R. (author) / Ostermeir, R. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 54 ; 153-160
1998-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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