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Oxidation of silicon by perchloric acid
Oxidation of silicon by perchloric acid
Oxidation of silicon by perchloric acid
Nishiyama, M. (author) / Mizokuro, T. (author) / Yoneda, K. (author) / Kobayashi, H. (author)
APPLIED SURFACE SCIENCE ; 133 ; 287-292
1998-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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