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Synthesis of Zr(B, C, N) layers by means of pulsed DC-PACVD

Rie, K.-T. / Gebauer, A. / Woehle, J. / Erker, G.

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Synthesis of Zr(B, C, N) layers by means of pulsed DC-PACVD

Rie, K.-T. / Gebauer, A. / Woehle, J. / Erker, G.

Synthesis of Zr(B, C, N) layers by means of pulsed DC-PACVD

Rie, K.-T. / Gebauer, A. / Woehle, J. / Erker, G.

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Order at Subito €

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Document information

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Title:

Synthesis of Zr(B, C, N) layers by means of pulsed DC-PACVD

Contributors:

Rie, K.-T. (author) / Gebauer, A. (author) / Woehle, J. (author) / Erker, G. (author)

Published in:

MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK ; 24 ; 353

Publication date:

1993-01-01

Size:

353 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

Unknown

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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