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Copper Metallization of Submicron Trenches with Pulsed Vacuum Arc

Siemroth, P. / Wenzel, P. / Witke, T. / Schultrich, B.

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Copper Metallization of Submicron Trenches with Pulsed Vacuum Arc

Siemroth, P. / Wenzel, P. / Witke, T. / Schultrich, B.

Copper Metallization of Submicron Trenches with Pulsed Vacuum Arc

Siemroth, P. / Wenzel, P. / Witke, T. / Schultrich, B.

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Check availability in my library

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Document information

Title:

Copper Metallization of Submicron Trenches with Pulsed Vacuum Arc

Contributors:

Siemroth, P. (author) / Wenzel, P. (author) / Witke, T. (author) / Schultrich, B. (author)

Published in:

MATERIALS SCIENCE FORUM ; 287/288 ; 239-242

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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