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Copper-Based Metallization in ULSI Structures

Li, J. / Seidel, T. E. / Mayer, J. W.

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Copper-Based Metallization in ULSI Structures

Li, J. / Seidel, T. E. / Mayer, J. W.

Copper-Based Metallization in ULSI Structures

Li, J. / Seidel, T. E. / Mayer, J. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

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Document information

Title:

Copper-Based Metallization in ULSI Structures

Contributors:

Li, J. (author) / Seidel, T. E. (author) / Mayer, J. W. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 19 ; 15

Publication date:

1994-01-01

Size:

15 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

Li, J. / Blewer, R. S. / Mayer, J. W. | British Library Online Contents | 1993

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