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    Design of Microelectrode Arrays for Electrostatic Microactuators and Capacitive Microsensors

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    New search for: Chang, C.
    New search for: Yen, K.

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    Design of Microelectrode Arrays for Electrostatic Microactuators and Capacitive Microsensors

    New search for: Chang, P.
    New search for: Chang, C.
    New search for: Yen, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Design of Microelectrode Arrays for Electrostatic Microactuators and Capacitive Microsensors

    New search for: Chang, P.
    New search for: Chang, C.
    New search for: Yen, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Title:

    Design of Microelectrode Arrays for Electrostatic Microactuators and Capacitive Microsensors

    Contributors:

    Chang, P. (author) / Chang, C. (author) / Yen, K. (author)

    Published in:

    JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES ; 9 ; 95-103

    Publication date:

    1998-01-01

    Size:

    9 pages

    ISSN:

    1045-389X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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