Synthesis of silicon-based polymerized films by excimer laser ablation deposition of hexaphenyldisilane: Fid-Bau Portal

Synthesis of silicon-based polymerized films by excimer laser ablation deposition of hexaphenyldisilane

Zeng, X. / Rossignol, F. / Konno, S. / Nagai, H. / Nakata, Y. / Okutani, T. / Suzuki, M.

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Synthesis of silicon-based polymerized films by excimer laser ablation deposition of hexaphenyldisilane

Zeng, X. / Rossignol, F. / Konno, S. / Nagai, H. / Nakata, Y. / Okutani, T. / Suzuki, M.

Synthesis of silicon-based polymerized films by excimer laser ablation deposition of hexaphenyldisilane

Zeng, X. / Rossignol, F. / Konno, S. / Nagai, H. / Nakata, Y. / Okutani, T. / Suzuki, M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Synthesis of silicon-based polymerized films by excimer laser ablation deposition of hexaphenyldisilane

Contributors:

Zeng, X. (author) / Rossignol, F. (author) / Konno, S. (author) / Nagai, H. (author) / Nakata, Y. (author) / Okutani, T. (author) / Suzuki, M. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 232-245

Publication date:

1999-01-01

Size:

14 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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