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Adhesion property of copper nitride film to silicon oxide substrate

Chwa, S. O. / Kim, K. H.

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Adhesion property of copper nitride film to silicon oxide substrate

Chwa, S. O. / Kim, K. H.

Adhesion property of copper nitride film to silicon oxide substrate

Chwa, S. O. / Kim, K. H.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Adhesion property of copper nitride film to silicon oxide substrate

Contributors:

Chwa, S. O. (author) / Kim, K. H. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 17 ; 1835-1838

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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