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Deposition and etch processes: continuum film evolution in microelectronics

Cale, T. S. / Rogers, B. R. / Merchant, T. P. / Borucki, L. J.

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Deposition and etch processes: continuum film evolution in microelectronics

Cale, T. S. / Rogers, B. R. / Merchant, T. P. / Borucki, L. J.

Deposition and etch processes: continuum film evolution in microelectronics

Cale, T. S. / Rogers, B. R. / Merchant, T. P. / Borucki, L. J.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deposition and etch processes: continuum film evolution in microelectronics

Contributors:

Cale, T. S. (author) / Rogers, B. R. (author) / Merchant, T. P. (author) / Borucki, L. J. (author) / De la Rubia, T. D.

Published in:

Modelling and Simulation in Semiconductor Processing ; 333-353

COMPUTATIONAL MATERIALS SCIENCE ; 12

Publication date:

1998-01-01

Size:

21 pages

ISSN:

0927-0256

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 510

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