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    Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications

    New search for: Vydianathan, K.
    New search for: Nuesca, G.
    New search for: Peterson, G.
    New search for: Eisenbraun, E. T.
    New search for: Kaloyeros, A. E.
    New search for: Sullivan, J. J.
    New search for: Han, B.

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    Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications

    New search for: Vydianathan, K.
    New search for: Nuesca, G.
    New search for: Peterson, G.
    New search for: Eisenbraun, E. T.
    New search for: Kaloyeros, A. E.
    New search for: Sullivan, J. J.
    New search for: Han, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications

    New search for: Vydianathan, K.
    New search for: Nuesca, G.
    New search for: Peterson, G.
    New search for: Eisenbraun, E. T.
    New search for: Kaloyeros, A. E.
    New search for: Sullivan, J. J.
    New search for: Han, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications

    Contributors:

    Vydianathan, K. (author) / Nuesca, G. (author) / Peterson, G. (author) / Eisenbraun, E. T. (author) / Kaloyeros, A. E. (author) / Sullivan, J. J. (author) / Han, B. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 1838-1849

    Publication date:

    2001-01-01

    Size:

    12 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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