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    Chemical solution deposition of PZT thin films for microelectronics

    New search for: Kosec, M.
    New search for: Malic, B.
    New search for: Mandeljc, M.

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    Chemical solution deposition of PZT thin films for microelectronics

    New search for: Kosec, M.
    New search for: Malic, B.
    New search for: Mandeljc, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical solution deposition of PZT thin films for microelectronics

    New search for: Kosec, M.
    New search for: Malic, B.
    New search for: Mandeljc, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Chemical solution deposition of PZT thin films for microelectronics

    Contributors:

    Kosec, M. (author) / Malic, B. (author) / Mandeljc, M. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 97-103

    Publication date:

    2002-01-01

    Size:

    7 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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